Head of Process Engineering – DTU Nanolab

Job Description

Organization: Technical University of Denmark (DTU) – DTU Nanolab

DTU Nanolab invites applications for the position of Head of Process Engineering. The role is part of DTU Nanolab’s core management team and carries overall responsibility for deposition, etching, and thermal processes within the facility. The successful candidate will be an experienced process expert with strong leadership capabilities, preferably holding a PhD and extensive hands-on cleanroom experience.

Key Responsibilities

  • Lead and manage process engineering activities related to plasma etching and thin-film deposition.
  • Oversee tools and processes including ICP and RIE etchers, PECVD, LPCVD, PVD, and ALD.
  • Manage in-line characterization equipment such as SEM, AFM, XRD, XPS, and ellipsometry.
  • Advise academic and industrial users on nanofabrication processes and technologies.
  • Participate in procurement and implementation of new cleanroom equipment.
  • Define and maintain process and material cross-contamination rules for tools.
  • Lead a team of experienced process specialists and contribute to DTU Nanolab’s management strategy.
  • Collaborate with research groups and industrial partners to expand nanofabrication capabilities.
  • Support Nordic and EU collaborations including initiatives such as EuroNanoLab, Nordic Nanolab Network, and EU Chips Joint Undertaking.

Required Qualifications

  • Master’s degree and preferably a PhD in micro/nanofabrication, physics, microelectronics, or a related discipline.
  • Minimum 10 years of hands-on cleanroom fabrication experience.
  • Extensive expertise in lithography (UV, DUV, e-beam), wet and dry etching, thin film deposition, and wafer-level processing.
  • Strong knowledge of plasma processes (ICP, RIE, PECVD, LPCVD, PEALD, sputtering).
  • Experience with non-plasma processes such as annealing, oxidation, diffusion doping, RTP, ALD, and thermal or e-beam PVD.
  • Experience with process development, yield optimization, and process windows.
  • Deep understanding of semiconductor materials including silicon, oxides, and metals.
  • Knowledge of cleanroom, chemical, and electrical safety practices.
  • Proven leadership experience managing highly skilled technical staff.
  • Fluent English communication skills; Danish language skills or willingness to learn are advantageous.

Employment Conditions

  • Full-time leadership position at DTU Lyngby Campus, Denmark.
  • Salary and terms of employment follow the collective agreement with the Danish Confederation of Professional Associations (AC).
  • Start date as soon as possible upon mutual agreement.

Application Instructions

Applications must be submitted online including a motivated application, CV, and relevant academic certificates. Applications received after the deadline will not be considered.

Application Deadline: 15 March 2026 (23:59 Danish time).

For further information, contact Jörg Hübner, Director of DTU Nanolab ([email protected]).

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